W. M. Keck Optical Metrology Lab and JILA Micro/Nano Fabrication Facility (RRID: SCR_018984)
Facility summary
ÌýÌý303-492-2389ÌýÌýÌý kecklab@jila.colorado.eduÌý
- Location: JILA S105, S120,ÌýX110, X121, X131
- Technology focus: Optical and surface characterization and micro/nanofabrication
- Metrology equipment summary: Spectrophotometers, interferometers, ellipsometer, atomic force microscope, optical microscopes, profilometers
- Fabrication equipment summary: SEM, E-beam and photo lithography tools, physical vapor and sputter deposition systems, reactive ion etcher
- Open to:ÌýCU ÐßÐßÊÓƵ, other universities, selected industries
The operates and manages both the Optical Metrology Lab and JILA's Micro and Nanofabrication Facility. The Keck Lab is a user-based facility to support research at JILA, other CU ÐßÐßÊÓƵÌýresearchers, and vetted non-CU entities.ÌýThe metrology lab is home to a number of specialized measuring tools for optical and surface characterization, as well as expertise in fiber optics.ÌýThe fabrication facility is a well-equipped Class 100/1000 (ISO 5/6) clean room for fabrication at the micron and nanometer scale.ÌýTraining and consultation is provided by the facility.
Amy Ekiriwang
Professional Research Assistant
Curtis Beimborn, PhD
Director
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